24
APR
2013

DEMONSTRATION OF HIGH-Q MID-INFRARED CHALCOGENIDE GLASS-ON-SILICON RESONATORS

High-index-contrast, waveguide-coupled chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process.The resonators exhibited a high intrinsic quality factor of 2×105 at 5.2 μm wavelength, which is among the highest...